Schubert, A.A.SchubertEdelmann, J.J.EdelmannGroß, S.S.GroßZeidler, H.H.ZeidlerMeichsner, G.G.MeichsnerHackert, M.M.HackertWolf, N.N.WolfSchneider, J.J.Schneider2022-03-1130.3.20112010https://publica.fraunhofer.de/handle/publica/36732210.1063/1.355236010.24406/publica-r-3673222-s2.0-79952567700Miniaturization leads to high requirements to the applied manufacturing processes especially in respect to the used hard to machine materials and the aims of structure size and geometrical accuracy. Traditional manufacturing processes reach their limits here. One alternative for these provide thermal and chemical ablation processes. These processes are applied for the production of different microstructures in different materials like hardened steel, carbides and ceramics especially for medical engineering and tribological applications.enmicromanufacturinglaser ablationElectro Discharge Machining (EDM)electrochemical machining (ECM)microfluidicmouldinghot embossingtribology620670Micromanufacturing of hard to machine materials by physical and chemical ablation processesMikrobearbeitung schwer bearbeitbarer Werkstoffe mittels physikalischer und chemischer Abtragsprozesseconference paper