Plasma-Assisted N2O Oxidation (PANO) in an Industrial Direct Plasma Reactor for Tunnel Oxide Passivating Contacts

Bories, MathiasMathiasBoriesPolzin, Jana-IsabelleJana-IsabellePolzinSteinhauser, BerndBerndSteinhauserBenick, JanJanBenickGlunz, StefanStefanGlunz2023-10-162023-10-162022Note-ID: 00005FEEhttps://publica.fraunhofer.de/handle/publica/451726enPlasma-Assisted N2O Oxidation (PANO) in an Industrial Direct Plasma Reactor for Tunnel Oxide Passivating Contactspresentation