Corbett, B.B.CorbettLi, Z.Z.LiBühler, K.K.BühlerNaumann, F.F.NaumannKrieger, U.U.KriegerWicht, S.S.WichtBower, C.A.C.A.Bower2022-03-142022-03-142019https://publica.fraunhofer.de/handle/publica/40577210.23919/LTB-3D.2019.8735381Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.enMicro-transfer-printing for heterogeneous integrationconference paper