Under CopyrightScharin, MarinaMarinaScharinRommel, MathiasMathiasRommelDirnecker, TobiasTobiasDirneckerRumler, MaximilianMaximilianRumlerFader, RobertRobertFaderBauer, A.J.A.J.BauerFrey, LotharLotharFreyHermman, MartinMartinHermman2022-03-129.10.20132013https://publica.fraunhofer.de/handle/publica/38087310.24406/publica-fhg-380873en670620530Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applicationsposter