Under CopyrightMattes, AndreasAndreasMattesLewke, DirkDirkLewkeSchellenberger, MartinMartinSchellenberger2022-03-1123.2.20122011https://publica.fraunhofer.de/handle/publica/37352210.24406/publica-fhg-373522A "virtual equipment" is presented which serves as a test bench for virtual metrology algorithms (VM). Statistical modifications and predictions based on fab history data are used alongside physical simulation to generate test data sets for various common and uncommon states of the processing equipment. These data sets are used to feed and compare the results of different VM algorithms and analyse their sensitivity and measurement capability.envirtual equipmentvirtual metrologytestingVEVM670620530presentation