Völker, B.B.VölkerFriedrichs, M.M.FriedrichsRudloff, D.D.RudloffBakke, T.T.Bakke2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/347906Simple monocrystalline silicon micromirror arrays have been fabricated using a CMOS compatible tungsten plug process. Mirror planarity and pre-deflection was characterized. It was found that the properties of these mirrors are superior to those previously made of aluminum.enmonocrystalline siliconmirror arrayCMOStungsten plugplastic deformationdrift free621conference paper