Stieglitz, T.T.StieglitzBeutel, H.H.BeutelSchüttler, M.M.SchüttlerMeyer, J.-U.J.-U.Meyer2022-03-032022-03-032000https://publica.fraunhofer.de/handle/publica/19836410.1023/A:1009955222114en610620Micromachined, polyimide-based devices for flexible neural interfacesjournal article