Schultrich, B.B.SchultrichSiemroth, P.P.SiemrothScheibe, H.J.H.J.Scheibe2022-03-032022-03-031997https://publica.fraunhofer.de/handle/publica/19045410.1016/S0257-8972(97)00016-9enBogentechnologieLaser-ArcIR-Diagnostik667621671543High rate deposition by vacuum arc methodsjournal article