Under CopyrightSchellenberger, MartinMartinSchellenbergerKoitzsch, MatthiasMatthiasKoitzschRoeder, GeorgGeorgRoederPfeffer, MarkusMarkusPfefferSchöpka, UlrichUlrichSchöpkaMattes, AndreasAndreasMattesPfitzner, LotharLotharPfitzner2022-03-1222.2.20132012https://publica.fraunhofer.de/handle/publica/37794810.24406/publica-fhg-377948Semiconductor devices are the essential basis for electronics-based value chains for, e.g., automotive, transport, energy efficiency, or medical technology. Those value chains are well-known strengths of European industry thus, it is of utmost importance to also keep the basis, i.e. semiconductor manufacturing in Europe. The research and development of manufacturing science solutions to substantially enhance efficiency was identified as competitiveness enabler for European semiconductor fabs.enIMPROVEEniac projectefficiency in semiconductor manufacturing670620530presentation