Ryssel, H.H.RysselLorenz, J.J.LorenzHoffmann, K.K.Hoffmann2022-03-022022-03-021986https://publica.fraunhofer.de/handle/publica/17380210.1007/BF00616841Models for the description of implantation profiles in multilayer targets are compared. It is found that all analytical models have severe limitations if the different layers possess very different stopping powers. The best description of multilayer targets is obtained by a combination model using density scaling of the range and integration to account for mass conservation.en670620530621journal article