Barniol, Núria2023-08-232023-08-232023978-1-6654-9309-3978-1-6654-9308-6https://publica.fraunhofer.de/handle/publica/44859410.1109/MEMS49605.2023enIEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023