Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)

Under CopyrightFörthner, MichaelMichaelFörthnerFader, RobertRobertFaderRumler, MaximilianMaximilianRumlerRommel, MathiasMathiasRommelFrey, LotharLotharFreyGirschikofsky, MaikoMaikoGirschikofskyBelle, StefanStefanBelleHellmann, RalfRalfHellmannKlein, Jan JasperJan JasperKlein2022-03-124.11.20142014https://publica.fraunhofer.de/handle/publica/38545610.24406/publica-fhg-385456ennanoimprintSCILBragg grating sensorhybride polymersormocere670620530Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)poster