Breitenstein, M.M.BreitensteinChristmann, A.A.ChristmannHölzel, R.R.HölzelBier, F.F.F.F.Bier2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/35991110.1063/1.3012302en610620530Preparation of nano-arrays by an atomic force microscopeconference paper