Three-dimensional simulation of topography and doping processes at FhG

Lorenz, J.J.LorenzBär, E.E.BärBurenkov, A.A.BurenkovHenke, W.W.HenkeTietzel, K.K.TietzelWeiß, M.M.Weiß2022-03-032022-03-031995https://publica.fraunhofer.de/handle/publica/187195en670620530Three-dimensional simulation of topography and doping processes at FhGbook article