Baum, M.M.BaumRota, A.A.RotaSalk, N.N.SalkOtto, T.T.OttoGessner, T.T.Gessner2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/360663en620660671Micro machining technologies for non silicon materialsconference paper