Knöbber, F.F.KnöbberBludau, O.O.BludauRöhlig, C.-C.C.-C.RöhligSah, R.E.R.E.SahWilliams, O.A.O.A.WilliamsKirste, LutzLutzKirsteLeopold, S.S.LeopoldPätz, D.D.PätzCimalla, VolkerVolkerCimallaAmbacher, OliverOliverAmbacherLebedev, VadimVadimLebedev2022-03-042022-03-042011https://publica.fraunhofer.de/handle/publica/22437710.1002/pssc.201000512In this work we report on the mechanical and material properties of membranes made of AlN and nanodiamond for the use in tunable micro-optics. AlN membranes with and without metal contacts have been studied in dynamic mode by laser Doppler vibrometry.de667journal article