Harzic, R. leR. leHarzicStark, M.M.StarkSchuck, H.H.SchuckBecker, P.P.BeckerLai, E.E.LaiBruneel, D.D.BruneelBauerfeld, F.F.BauerfeldSauer, D.D.SauerVelten, T.T.VeltenKönig, K.K.König2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/217291Sub-wavelength multiphoton nanoprocessing of silicon wafers, direct nanowriting of metals, boro-silicate glass or polymers, laser processing for nanofluidics applications as well as 3D maskless li-thography by two-photon polymerization have been performed using several compact near infrared MHz femtosecond lasers as tuneable turn-key, one-box Chameleon (coherent) and Mai-Tai (spectra physics) oscillators as well as a special femtoTrain system (High Q laser production GmbH). The lasers were coupled with the scanning microscopes FemtOcut (JenLab GmbH) and a modified ZEISS LSM510-NLO system. MHz femtosecond laser pulses with nanojoule photon energies can be considered as novel tools for nanoprocessing in material science, nanobiotechnology and nanomedicine.en610620621journal article