Meliorisz, B.B.MelioriszPartel, S.S.PartelSchnattinger, T.T.SchnattingerFühner, T.T.FühnerErdmann, A.A.ErdmannHudek, P.P.Hudek2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/35832310.1016/j.mee.2007.12.0122-s2.0-44149107999en670Investigation of high-resolution contact printingconference paper