Influence of Aluminum Compensation Effects in 4H-SiC on the Performance of VDMOS Transistors

Under CopyrightSchlichting, HolgerHolgerSchlichtingKocher, MatthiasMatthiasKocherWeiße, JuliettaJuliettaWeißeErlbacher, TobiasTobiasErlbacherBauer, A.J.A.J.Bauer2022-03-1419.11.20192019https://publica.fraunhofer.de/handle/publica/40561010.24406/publica-fhg-405610en670620530Influence of Aluminum Compensation Effects in 4H-SiC on the Performance of VDMOS Transistorsposter