Schneider, D.D.SchneiderOllendorf, H.H.OllendorfSchwarz, T.T.Schwarz2022-03-032022-03-031995https://publica.fraunhofer.de/handle/publica/18676310.1007/BF01538193Measuring the propagation velocity of ultrasonic surface waves has been used to determine the Young's modulus of TiN films on steel. Wide-band surface wave im- pulses are generated by a pulsed nitrogen laser and detected by a piezoelectric PVDF-foil transducer. A spectrum of the surface wave phase velocity is obtained from the Fourier transformation of the surface wave signals. The TiN films were deposited after different pre-sputtering times with argon ions to vary the adhesion on the steel substrate. The adhesion behaviour of the films were investigated with the scratch tester. A correlation was found between the Young's modulus of the film material and the acoustic emission activity in the scratch test, which has been shown to be a suitable measure for the adhesion.enacoustic emissionacoustic surface waveadhesion testakustische Emissionakustische OberflächenwelleDünnschichtmeßtechnikE-ModulKratztestnon-destructive testingphotoacoustic test method for thin filmsphotoakustische DünnschichtmeßtechnikSchichthaftungscratch testthin film characterisationTiN-filmTiN-SchichtWeibull statisticWeibull-StatistikYoung's moduluszerstörungsfreie Prüfung667621671journal article