Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 13 & Advanced CMOS-Compatible Semiconductor Devices 20

Jagannathan, Hemanth2023-10-312023-10-312023978-1-7138-7551-2978-1-62332-686-9https://publica.fraunhofer.de/handle/publica/452448enSilicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 13 & Advanced CMOS-Compatible Semiconductor Devices 20