Plasma-activated high-rate deposition of oxides on plastic films

Schiller, S.S.SchillerNeumann, M.M.NeumannMorgner, M.M.MorgnerSchiller, N.N.Schiller2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/322956en667670620Plasma-activated high-rate deposition of oxides on plastic filmsconference paper