Transducers & Eurosensors 2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.2

Delapierre, G.2022-03-022022-03-0220071-4244-0842-31-4244-0841-5https://publica.fraunhofer.de/handle/publica/145568Transducers & Eurosensors 2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.2