Oehr, ChristianChristianOehr2022-03-052022-03-052014https://publica.fraunhofer.de/handle/publica/24146110.1002/vipr.201490043de533621PSE 2014, Vierzehnte internationale Konferenz zum Plasma Surface Engineering in Garmisch-PartenkirchenPSE 2014, The 14th International Conference on Plasma Surface Engineering in Garmisch-Partenkirchenjournal article