In situ measurement of deformations on microelectronic components by microscopic methods

Faust, W.W.FaustBombach, C.C.BombachMichel, M.M.MichelMichel, B.B.Michel2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/336261en621In situ measurement of deformations on microelectronic components by microscopic methodsconference paper