Dobmann, S.S.DobmannPloss, D.D.PlossReibold, D.D.ReiboldErdmann, A.A.ErdmannPeschel, U.U.Peschel2022-03-112022-03-112010https://publica.fraunhofer.de/handle/publica/369673We present experiments on a metamaterial made from an ultrathin (< 40 nm) metal film. It exhibits extraordinary low transmission due to an antenna resonance and may form building blocks of future lithographic masks.en670conference paper