A monolithic integrated accelerometer fabricated by an industrial CMOS process

Riethmüller, W.W.RiethmüllerBenecke, W.W.BeneckeSchnakenberg, U.U.Schnakenberg2022-03-082022-03-081991https://publica.fraunhofer.de/handle/publica/318864en621A monolithic integrated accelerometer fabricated by an industrial CMOS processconference paper