Knöbber, F.F.KnöbberSillero, E.E.SilleroRöhlig, C.-C.C.-C.RöhligWilliams, O.A.O.A.WilliamsSah, R.E.R.E.SahKirste, LutzLutzKirsteCimalla, VolkerVolkerCimallaNebel, C.E.C.E.NebelCalle, F.F.CalleLebedev, VadimVadimLebedev2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/363595en667Piezoelectrically actuated AlN and Nanodiamond microstructuresconference paper