Tortschanoff, A.A.TortschanoffBaumgart, M.M.BaumgartHolzmann, D.D.HolzmannLenzhofer, M.M.LenzhoferSandner, T.T.SandnerKenda, A.A.Kenda2022-03-042022-03-042014https://publica.fraunhofer.de/handle/publica/23674110.1007/s00542-013-2026-22-s2.0-84897563632Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.en621journal article