Jordan, G.G.JordanMcCarthy, D.N.D.N.McCarthySchlepple, N.N.SchleppleKrißler, J.J.KrißlerSchröder, H.H.SchröderKofod, G.G.Kofod2022-03-042022-03-042011https://publica.fraunhofer.de/handle/publica/22503410.1109/TMECH.2010.2089991Analysis of the operating characteristics of a dielectric elastomer actuator (DEA) submount for the high-precision positioning of optical components in one dimension is presented. Precise alignment of a single-mode fiber is demonstrated and variation of the sensitivity of the submount motion by changing the bias voltage is confirmed. A comparison of the performance of the DEA submount with a piezoelectric alignment stage is made, which demonstrates that DEAs could present a very attractive, low-cost alternative to currently used manual technologies in overcoming the hurdle of expensive packaging of single-mode optical components.en621628Actuated micro-optical submount using a dielectric elastomer actuatorjournal article