A MEMS friction vacuum gauge suitable for high temperature environment

Tenholte, D.D.TenholteKurth, S.S.KurthGessner, T.T.GessnerDötzel, W.W.Dötzel2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/35793910.1016/j.sna.2007.05.031en621A MEMS friction vacuum gauge suitable for high temperature environmentconference paper