Ultrafast laser processing - novel options for photonic device production

Nolte, S.S.NolteBlömer, D.D.BlömerBurghoff, J.J.BurghoffSzameit, A.A.SzameitWill, M.M.WillTünnermann, A.A.Tünnermann2022-03-032022-03-032005https://publica.fraunhofer.de/handle/publica/208326en620666Ultrafast laser processing - novel options for photonic device productionjournal article