Weisener, T.T.WeisenerVögele, G.G.VögeleWidmann, M.M.WidmannBark, C.C.BarkSchraft, R.D.R.D.SchraftBertholds, A.A.BertholdsBraunschweiler, A.A.Braunschweiler2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/326099The development of small pumps in the area of microsystem technology has lead to many different prototypes, mainly using membranes. In contrast to this, a rotary working pump has been developed at IPA with which both an improvement in output, as well as pressures previously not possible have been reached. After a first prototype pump with an outer diameter of 10 mm an optimized prototype with an outer diameter of only 2.5 mm was fabricated in cooperaton with AGIE applying electro-discharge-machining. Presently IPA is working upon the design of a micromotor with the same functional principles. The applications of the new microhydraulic system are exceedingly numerous and extend from technical to medical products.enFeinwerktechnikFluidikGerotorKleinaktorenMedizintechnikMikromotorMikropumpeMikrotechnologie670conference paper