Hackenberg, M.G.M.G.HackenbergJoppich, W.W.JoppichMijalkovic, S.S.MijalkovicSontowski, T.T.Sontowski2022-03-072022-03-071996https://publica.fraunhofer.de/handle/publica/288898en003005006518Simulation of thermal oxidation and diffusion processes by the parallel PDE solver LiSSbook