On the use of a multiple magnetron arrangement for metallization of electronic components at high productivity

Schiller, S.S.SchillerHeisig, U.U.HeisigGoedicke, K.K.GoedickeHartung, J.J.Hartung2022-03-082022-03-081988https://publica.fraunhofer.de/handle/publica/31547210.1016/0257-8972(88)90028-Xen667670620On the use of a multiple magnetron arrangement for metallization of electronic components at high productivityconference paper