Delapierre, G.2022-03-022022-03-0220071-4244-0841-5978-1-4244-0841-21-4244-0842-3https://publica.fraunhofer.de/handle/publica/146240Transducers & Eurosensors 2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.3