Under CopyrightSchenk, HaraldHaraldSchenk2024-12-132024-12-132024-06-14https://doi.org/10.24406/publica-3964https://publica.fraunhofer.de/handle/publica/48067410.24406/publica-3964enElectrostatic drivesActuatorsSpeakerMicro Mirror ArraysSilicon integrated electrostatic drivespresentation