Modeling, Manufacturing and Characterization of Electrostatic Actuators towards Electrostatic Silicon MEMS-Micropumps

Anheuer, DanielDanielAnheuerLeistner, HenryHenryLeistnerGeorge, BrindaBrindaGeorgeRoehl, SiegfriedSiegfriedRoehlRichter, MartinMartinRichterKutter, ChristophChristophKutter2023-11-202023-11-202023-10https://publica.fraunhofer.de/handle/publica/457013enElectrostaticActuatorMicropumpModeling, Manufacturing and Characterization of Electrostatic Actuators towards Electrostatic Silicon MEMS-Micropumpsconference paper