Under CopyrightFernandez-Bolanos, MontserratMontserratFernandez-BolanosMuller, AndreiAndreiMullerWeber, JosefJosefWeberRamm, PeterPeterRamm2022-03-1317.7.20182018https://publica.fraunhofer.de/handle/publica/40087410.1109/DTIP.2018.839420310.24406/publica-r-400874A few application demonstrators of heterogeneous 3D integrated systems including innovative nanosensors for gas detection and biofludic applications have been successfully implemented showing efficient low-temperature heterogeneous integration processes, miniaturization, low power consumption, extremely low detection limits (5 ppm) and novel functionalities very interesting for smart sensors in automotive and healthcare applications.en3D integrationadvanced sensor systemsheterogeneous integrationlow-temperature bondingThrough Silicon Vias (TSV)Solid-Liquid Interdiffusion (SLID)FET-based sensorsCNT-based gas sensorHeterogeneous 3D Integration621conference paper