Implementing transparent conducting oxides on ultrathin SiOx/poly-Si passivating contacts by DC sputtering

Under CopyrightTutsch, LeonardLeonardTutschFeldmann, FrankFrankFeldmannPolzin, Jana-IsabelleJana-IsabellePolzinBivour, MartinMartinBivourMoldovan, AnamariaAnamariaMoldovanMacco, BartBartMaccoHermle, MartinMartinHermleKessels, ErwinErwinKesselsGlunz, Stefan W.Stefan W.Glunz2022-03-1427.6.20192019https://publica.fraunhofer.de/handle/publica/40475010.24406/publica-fhg-404750enPhotovoltaikSilicium-PhotovoltaikOberflächen: KonditionierungPassivierungLichteinfangHerstellung und Analyse von hocheffizienten Solarzellen621697Implementing transparent conducting oxides on ultrathin SiOx/poly-Si passivating contacts by DC sputteringpresentation