Richter, S.S.RichterHeinrich, M.M.HeinrichDöring, S.S.DöringTünnermann, A.A.TünnermannNolte, S.S.Nolte2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/37169110.1109/CLEOE.2011.5943317We present investigations on the formation process of femtosecond-induced self-organized nanostructures. The growth occurs in three distinct stages governed by the number of incident pulses. Nanogratings are realized up to a repetition-rate of 10 MHz.en620Formation process of femtosecond laser-induced nanogratings at high repetition ratesconference paper