Hybrid assembly of micro scanner arrays with large aperture and their system integration

Sandner, ThiloThiloSandnerWildenhain, MichaelMichaelWildenhainSchwarzenberg, MarkusMarkusSchwarzenbergSchenk, HaraldHaraldSchenk2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/382997en621Hybrid assembly of micro scanner arrays with large aperture and their system integrationconference paper