Jägle, MartinMartinJäglePernau, Hans-FridtjofHans-FridtjofPernauPfützner, MarcusMarcusPfütznerBenkendorf, MikeMikeBenkendorfLi, XinkeXinkeLiBartel, MarkusMarkusBartelDrost, SusanneSusanneDrostWöllenstein, JürgenJürgenWöllenstein2022-03-052022-03-052018https://publica.fraunhofer.de/handle/publica/25507510.3390/proceedings2131053Electrical impedance spectroscopy is a widespread characterization method for solids or fluids in industrial applications. We here report on its thermal equivalent, the ""thermal impedance spectroscopy"", improved by using a temperature compensation method for temperature dependent thermal measurements using an on-chip reference resistor.enthermal impedance3-Omegatemperature compensation621journal article