Under CopyrightJelinek, MorizMorizJelinekLaven, Johannes G.Johannes G.LavenGanagona, N.N.GanagonaJob, R.R.JobSchustereder, WernerWernerSchusterederSchulze, Hans-JoachimHans-JoachimSchulzeRommel, MathiasMathiasRommelFrey, LotharLotharFrey2022-03-126.10.20152015https://publica.fraunhofer.de/handle/publica/38918810.24406/publica-fhg-389188enDLTSproton implantationmetastable defect670620530Metastable defects in proton implanted and annealed siliconposter