Klas, R.R.KlasEschen, W.W.EschenKirsche, A.A.KirscheRothhardt, J.J.RothhardtLimpert, J.J.Limpert2022-03-152022-03-152020https://publica.fraunhofer.de/handle/publica/41237310.1364/EUVXRAY.2020.ETh3A.82-s2.0-85102307603A HHG source generating a broadband continuum from 70 eV to 120 eV with an average power of 2 µW is presented. At 92 eV (13.5 nm) 7 109 ph/s/eV are generated with an rms deviation of 0.8% over 20 minutes.en620conference paper