Investigations on the long time behavior of the metastable boron-oxygen complex in crystalline silicon

Herguth, A.A.HerguthSchubert, G.G.SchubertKaes, M.M.KaesHahn, G.G.Hahn2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/21558410.1002/pip.779en621Investigations on the long time behavior of the metastable boron-oxygen complex in crystalline siliconjournal article