Shaporin, AlexeyAlexeyShaporinHermann, SaschaSaschaHermannKaufmann, C.C.KaufmannSchulz, Stefan E.Stefan E.SchulzGeßner, ThomasThomasGeßnerVoigt, SvenSvenVoigtMehner, J.J.MehnerHartmann, SusanneSusanneHartmannWunderle, BernhardBernhardWunderleBonitz, JensJensBonitz2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/382310enWafer-level technology for piezoresistive electro-mechanical transducer based on Carbon Nanotubesconference paper