Bischoff, M.M.BischoffNowitzki, T.T.NowitzkiVoß, O.O.VoßWilbrandt, S.S.WilbrandtStenzel, O.O.Stenzel2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/38333710.1364/OIC.2013.PMB.10IBS coatings were examined after deposition and after a defined annealing process. The optical and mechanical properties were improved significantly. The remaining coating stress can directly be controlled by selected process parameters.enconference paper