Chemistry of mixed ligand all nitrogen coordinated Ta, Hf, and W precursors for metal nitride MOCVD

Under CopyrightBaunemann, A.A.BaunemannRische, D.D.RischeKim, Y.Y.KimParala, H.H.ParalaBauer, A.J.A.J.BauerLemberger, M.M.LembergerFischer, R.A.R.A.Fischer2022-03-109.3.20102005https://publica.fraunhofer.de/handle/publica/35032610.24406/publica-fhg-350326en670620530Chemistry of mixed ligand all nitrogen coordinated Ta, Hf, and W precursors for metal nitride MOCVDposter