Under CopyrightSkupsch, ChristophChristophSkupschHeber, JörgJörgHeberBerndt, DirkDirkBerndtWagner, MichaelMichaelWagnerRückerl, FlorianFlorianRückerlTinevez, Jean-YvesJean-YvesTinevezShorte, SpencerSpencerShorte2022-03-1211.12.20142014https://publica.fraunhofer.de/handle/publica/38583610.24406/publica-fhg-385836Integrating MEMS in an optical beam line allows the precise steering and structuring of light. We present diffractive micro-mirror arrays for enhanced illumination in a microscope setup. The illumination pattern, the beam angle, the intensity, and the pulse duration can be modulated continuously and independently in the kHz range. This new modulator prepares striking enhancements in fluorescence microscopy.enspatial light modulatormicro-mirror arrayfluorescence microscopy621presentation